双炉膛滑动CVD控制系统

Voltage

电压

·Voltage rated:AC220-380V 50/60HZ

·额定电压：AC220-380V50/60HZ

Working Temperature

工作温度

·Max. Temperature: 1200°C ( 1 hr)

最高温度：1200℃ (1小时)

·Continuous working temperature:≤1100℃

持续工作温度：≤1100℃

·Max. Heating/collingRate:≤20°C /S

最大升/降温速率：≤20℃/秒

Temperature Controller

控温方式

·PID automatic control and auto-tune function.

触摸屏控制加PLC控制和和模糊 PID自整定调节

·30 programmable segments for precise thermal processing.

智能化30段可编程控制

·Built-in protection for the over-heated and broken thermocouple.

超温和断偶报警功能

Length of heating zone

加热区长度

·500+500mm

Length of constant zone

恒温区长度

·200+200mm

Heating Elements

加热元件

·Resistance wire, Fe-Cr-Al Alloy doped by Mo

·电阻丝（掺钼铁铬铝合金）

Temperature Accuracy

控温精度

+/- 1°C

Processing tube

炉管

·Φ210*2000mm(optional)

·Two tube blocks are included for blocking heat radiation generated from tube center，must be fully inserted into the furnace chamber before heatingin the correct position(quartz or ceramic optional).

两个管堵阻挡管中心产生的热辐射，必须在加热前塞进炉膛的正确位置（石英货氧化铝管堵可选）

Dimensions

尺寸

·Furnace size : 2700*1500*1650mm(L*W*H without tube & flange)

·炉子尺寸：2700*1500*1650mm(长*宽*高 不含炉管和法兰)

Net Weight

净重

580kg

Vacuum Flange

真空法兰

·KF25/16quick clamp flange

两端为KF25/16快速卡箍法兰

Vacuum Pressure

真空压力

·133torr can be achieved by mechanical pump

机械泵可达133torr（1pa）

·10^-6 torr can be reached by molecular pump

分子泵可达10^-6torr（10^-3pa）